Sensofar proprietary confocal algorithms provide vertical repeatability on the nmscale. |
VSI |
PSI |
Focus Variation
Sensofar’s implementation of this approach has been specifically designed to complement confocal measurements at low magnification. Highlights of the technology include high slope surfaces (up to 86°), highest measurement speeds (mm/s) and large vertical range.
This combination of features is largely suited to tooling applications. |
White-light vertical scanning interferometers (VSI) measure the surface height of smooth to moderately roughsurfaces, providing nm vertical resolution regardless of the NA. The S neox can thus use all available magnifications to profile shape features with no compromise in height. resolution |
Phase shifting interferometers (PSI) measure the surface height of very smooth and continuous surfaces, providing sub-nm vertical resolution regardless of the NA. Very low magnifications (2.5X) thus enable large FOVsto be acquired with no compromise. in height resolution. |